Electron beam-induced current imaging with two-angstrom resolution

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Keywords : semiconductor , electron beam induced current , depletion region modulation

I N T R O D U C T I O N The minority carrier diffusion length is one of main parameters characterizing the quality of semiconductor materials. Therefore development of methods for diffusion length measurements and reconstruction of its spatial distribution is very important for the characterization of as-grown semiconductor materials and structures, characterization of technology processes and ...

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ژورنال

عنوان ژورنال: Ultramicroscopy

سال: 2019

ISSN: 0304-3991

DOI: 10.1016/j.ultramic.2019.112852